Ohmic contact properties depending on AlGaN layer thickness for AlGaN/GaN high electron mobility transistor structures

Yusuke Takei; Mari Okamoto; Wataru Saito; Kazuo Tsutsui; Kuniyuki Kakushima; Hitoshi Wakabayashi; Yoshinori Kataoka; Hiroshi Iwai

doi:10.1149/06104.0265ecst

Ohmic contact properties depending on AlGaN layer thickness for AlGaN/GaN high electron mobility transistor structures

Yusuke Takei, Mari Okamoto, Wataru Saito, Kazuo Tsutsui, Kuniyuki Kakushima, Hitoshi Wakabayashi, Yoshinori Kataoka, Hiroshi Iwai

研究成果: Contribution to journal › Conference article › 査読

5 被引用数 (Scopus)

抄録

Mo/Al/Ti or TiN/TiSi₂ ohmic contacts were fabricated on AlGaN/GaN HEMT structures having various thicknesses of AlGaN layers. Optimum thicknesses depending on annealing temperature were found, which should be correlated with the contact formation mechanism.

本文言語	英語
ページ（範囲）	265-270
ページ数	6
ジャーナル	ECS Transactions
巻	61
号	4
DOI	https://doi.org/10.1149/06104.0265ecst
出版ステータス	出版済み - 1 1 2014
外部発表	はい
イベント	Symposium on Wide Bandgap Semiconductor Materials and Devices 15 - 225th ECS Meeting - Orlando, 米国継続期間: 5 11 2014 → 5 15 2014

All Science Journal Classification (ASJC) codes

Engineering(all)

文献へのアクセス

10.1149/06104.0265ecst

他のファイルとリンク

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引用スタイル

Ohmic contact properties depending on AlGaN layer thickness for AlGaN/GaN high electron mobility transistor structures. / Takei, Yusuke; Okamoto, Mari; Saito, Wataru; Tsutsui, Kazuo; Kakushima, Kuniyuki; Wakabayashi, Hitoshi; Kataoka, Yoshinori; Iwai, Hiroshi.

In: ECS Transactions, Vol. 61, No. 4, 01.01.2014, p. 265-270.

研究成果: Contribution to journal › Conference article › 査読

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abstract = "Mo/Al/Ti or TiN/TiSi2 ohmic contacts were fabricated on AlGaN/GaN HEMT structures having various thicknesses of AlGaN layers. Optimum thicknesses depending on annealing temperature were found, which should be correlated with the contact formation mechanism.",

author = "Yusuke Takei and Mari Okamoto and Wataru Saito and Kazuo Tsutsui and Kuniyuki Kakushima and Hitoshi Wakabayashi and Yoshinori Kataoka and Hiroshi Iwai",

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AU - Takei, Yusuke

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AU - Tsutsui, Kazuo

AU - Kakushima, Kuniyuki

AU - Wakabayashi, Hitoshi

AU - Kataoka, Yoshinori

AU - Iwai, Hiroshi

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