On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control

Yusuke Kasai, Shinya Sakuma, Fumihito Arai

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We present an on-chip cavitation generation system based on ultra-high-speed flow control. Novelties are that: (1) cavitation is observable in a high-rigidity microfluidic chip consisting of glass-Si-glass layered substrates, and (2) cavitation can be generated only based on flow control. As results, constructing on-chip membrane pumps for ultrahigh-speed flow, we succeeded in the on-chip cavitation generation by ultra-high-speed flow control and observing its phenomenon on a microscope. In addition, we found that the result corresponded to the Finite Element Method (FEM) analysis which showed that the cavitation occurred at the area where the dynamic pressure was lower than the saturated vaper pressure of water.

本文言語英語
ホスト出版物のタイトル2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
出版社Institute of Electrical and Electronics Engineers Inc.
ページ801-804
ページ数4
ISBN(電子版)9781728120072
DOI
出版ステータス出版済み - 6 2019
外部発表はい
イベント20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, ドイツ
継続期間: 6 23 20196 27 2019

出版物シリーズ

名前2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

会議

会議20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Countryドイツ
CityBerlin
Period6/23/196/27/19

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

フィンガープリント 「On-Chip Cavitation Generation Based on Ultra-High-Speed Flow Control」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル