On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface

M. Hagiwara, T. Kawahara, T. Iijima, T. Masuda, Yoko Yamanishi, F. Arai

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

This paper presents the high speed microrobot actuation driven by permanent magnet in a microfluidic chip. The comprehensive analysis of fluid force, the optimum design and its fabrication was conducted to reduce the fluid force on the magnetically driven microrobot by attaching riblet shape on the microrobot. The Ni and Si composite fabrication was employed to form the optimum riblet shape on the Ni based microrobot by anisotropic Si wet etching and deep reactive ion etching. The evaluation experiments show the microrobot can actuate up to 100 Hz, which is 10 times higher than the original microrobot. In addition, since the microrobot was covered by Si, which is bio-compatible, it can be applied to cell manipulation without harm.

元の言語英語
ホスト出版物のタイトル2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
ページ108-112
ページ数5
DOI
出版物ステータス出版済み - 7 6 2012
イベント22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation - Nagoya, 日本
継続期間: 11 6 201111 9 2011

出版物シリーズ

名前2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"

その他

その他22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation
日本
Nagoya
期間11/6/1111/9/11

Fingerprint

Composite structures
Fabrication
Fluids
Wet etching
Reactive ion etching
Microfluidics
Permanent magnets
Composite materials
Experiments
Optimum design

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Mechanical Engineering

これを引用

Hagiwara, M., Kawahara, T., Iijima, T., Masuda, T., Yamanishi, Y., & Arai, F. (2012). On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. : 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation" (pp. 108-112). [6102169] (2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"). https://doi.org/10.1109/MHS.2011.6102169

On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. / Hagiwara, M.; Kawahara, T.; Iijima, T.; Masuda, T.; Yamanishi, Yoko; Arai, F.

2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation". 2012. p. 108-112 6102169 (2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation").

研究成果: 著書/レポートタイプへの貢献会議での発言

Hagiwara, M, Kawahara, T, Iijima, T, Masuda, T, Yamanishi, Y & Arai, F 2012, On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. : 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"., 6102169, 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation", pp. 108-112, 22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation, Nagoya, 日本, 11/6/11. https://doi.org/10.1109/MHS.2011.6102169
Hagiwara M, Kawahara T, Iijima T, Masuda T, Yamanishi Y, Arai F. On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. : 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation". 2012. p. 108-112. 6102169. (2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"). https://doi.org/10.1109/MHS.2011.6102169
Hagiwara, M. ; Kawahara, T. ; Iijima, T. ; Masuda, T. ; Yamanishi, Yoko ; Arai, F. / On-chip high speed microrobot made of Ni-Si composite structure with three-dimensionally patterned surface. 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation". 2012. pp. 108-112 (2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation").
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