Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma

Abdelrahman Zkria, Fouad Abdel-Wahab, Yuki Katamune, Tsuyoshi Yoshitake

研究成果: ジャーナルへの寄稿記事

2 引用 (Scopus)

抄録

Ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were deposited in the ambient of hydrogen by coaxial arc plasma deposition. The film compositions and chemical bonding structures were investigated by X-ray diffraction, X-ray photoemission and hydrogen forward scattering spectroscopies. The sp 3 /(sp 2 +sp 3 ) ratio and hydrogen content in the film were estimated to be 64% and 35 at.%, respectively. The optical parameters and the optical dispersion profile were determined by using a variable angle spectroscopic ellipsometer at 55° 65° and 75° angle of incidence in the photon energy range of 0.9–5 eV. Combinations of multiple Gaussian, and Tauc-Lorentz or Cody-Lorentz dispersion functions are used to reproduce the experimental data. Results of ellipsometry showed a refractive index of approximately 2.05 (at 2eV) and optical band gap of 1.63 eV. The imaginary part of dielectric function exhibited a peak at 3.8 eV, which has assigned to π-π* electron transitions. Furthermore, Electron spin resonance measurements implied the existence of dangling bonds, which might have a partial contribution to the optical absorption properties of the deposited films. A correlation between optical parameters and structural profile of the deposited films is discussed.

元の言語英語
ページ(範囲)143-148
ページ数6
ジャーナルCurrent Applied Physics
19
発行部数2
DOI
出版物ステータス出版済み - 2 1 2019

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Diamond
Carbon films
Amorphous carbon
Composite films
plasma jets
Diamonds
diamonds
Plasmas
Hydrogen
composite materials
carbon
Optical correlation
Forward scattering
Plasma deposition
hydrogen
Dangling bonds
Optical band gaps
Ellipsometry
Photoemission
Electron transitions

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

これを引用

Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma. / Zkria, Abdelrahman; Abdel-Wahab, Fouad; Katamune, Yuki; Yoshitake, Tsuyoshi.

:: Current Applied Physics, 巻 19, 番号 2, 01.02.2019, p. 143-148.

研究成果: ジャーナルへの寄稿記事

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