Optical and structural characterization of ultrananocrystalline diamond/hydrogenated amorphous carbon composite films deposited via coaxial arc plasma

Abdelrahman Zkria, Fouad Abdel-Wahab, Yuki Katamune, Tsuyoshi Yoshitake

研究成果: ジャーナルへの寄稿学術誌査読

12 被引用数 (Scopus)

抄録

Ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were deposited in the ambient of hydrogen by coaxial arc plasma deposition. The film compositions and chemical bonding structures were investigated by X-ray diffraction, X-ray photoemission and hydrogen forward scattering spectroscopies. The sp3/(sp2+sp3) ratio and hydrogen content in the film were estimated to be 64% and 35 at.%, respectively. The optical parameters and the optical dispersion profile were determined by using a variable angle spectroscopic ellipsometer at 55° 65° and 75° angle of incidence in the photon energy range of 0.9–5 eV. Combinations of multiple Gaussian, and Tauc-Lorentz or Cody-Lorentz dispersion functions are used to reproduce the experimental data. Results of ellipsometry showed a refractive index of approximately 2.05 (at 2eV) and optical band gap of 1.63 eV. The imaginary part of dielectric function exhibited a peak at 3.8 eV, which has assigned to π-π* electron transitions. Furthermore, Electron spin resonance measurements implied the existence of dangling bonds, which might have a partial contribution to the optical absorption properties of the deposited films. A correlation between optical parameters and structural profile of the deposited films is discussed.

本文言語英語
ページ(範囲)143-148
ページ数6
ジャーナルCurrent Applied Physics
19
2
DOI
出版ステータス出版済み - 2月 2019

!!!All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 物理学および天文学(全般)

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