Optical and structural properties of zinc-oxide thin film deposited by pulsed laser deposition

Tamiko Ohshima, Raj K. Thareja, Yukihiko Yamagata, Tomoaki Ikegami, Kenji Ebihara

研究成果: ジャーナルへの寄稿会議記事査読

2 被引用数 (Scopus)

抄録

We report optical and structural properties of ZnO films deposited by pulsed laser deposition technique on silicon (100) n-type, quartz, sapphire, and coming glass substrates. We have studied the influence of the deposition parameters, such as substrate temperature, oxygen pressure, and laser fluence on the properties of the grown films. Dependence of nanocrystallites on temperature of substrate and ambient gas pressure is investigated. ZnO plasma created at varying fluence of KrF laser (248 nm) on the target was investigated using optical emission spectroscopy and 2-d images of the expanding plumes at various pressures of the ambient gas. X-ray diffraction, atomic force microscopy, electron probe micro-analyzer, and spectro-photometry were used to characterize as grown films.

本文言語英語
ページ(範囲)F3201-F3206
ジャーナルMaterials Research Society Symposium - Proceedings
666
DOI
出版ステータス出版済み - 2001
外部発表はい
イベントTransport and Microstructural Phenomena in Oxide Electronics - San Francisco, CA, 米国
継続期間: 4月 16 20014月 20 2001

!!!All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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