Optical micro displacement sensor using a composite cavity laser diode integrated with a microlens

Jun Ichi Shimada, Yoshitada Katagiri, Osamu Ohguchi, Renshi Sawada

    研究成果: Contribution to journalArticle査読

    2 被引用数 (Scopus)

    抄録

    We demonstrated an extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle, which is that the light output power from the laser diode changes with reflectance and displacement of the third mirror. The light output power from the device was modulated by the reflectance of the third mirror with the displacement in the lateral direction. The modulation depth was 0.1 when the third mirror reflectances were 70% and 4%, and the resolution in the lateral direction was 3 μm. The light output power was also modulated by the third mirror displacement in the axial direction with a period of 0.4 mu m, and a modulation depth of 0.047 was obtained.

    本文言語英語
    ページ(範囲)140-146
    ページ数7
    ジャーナルJournal of Micromechanics and Microengineering
    4
    3
    DOI
    出版ステータス出版済み - 9 1994

    All Science Journal Classification (ASJC) codes

    • 電子材料、光学材料、および磁性材料
    • 材料力学
    • 機械工学
    • 電子工学および電気工学

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