Optical microsensors integration technologies for biomedical applications

Eiji Higurashi, Renshi Sawada, Tadatomo Suga

    研究成果: Contribution to journalArticle査読

    12 被引用数 (Scopus)

    抄録

    This paper focuses on optical integration technology and its application in optical microsensors used in biomedical fields. The integration is based on the hybrid integration approach, achieving high performance, small size and weight, and lower cost. First, we describe the key technologies used in hybrid integration, namely passive alignment technology, low temperature bonding technology, and packaging technology for realizing advanced microsensors. Then, we describe an integrated laser Doppler flowmeter that can monitor blood flow in human skin.

    本文言語英語
    ページ(範囲)231-238
    ページ数8
    ジャーナルIEICE Transactions on Electronics
    E92-C
    2
    DOI
    出版ステータス出版済み - 1 1 2009

    All Science Journal Classification (ASJC) codes

    • 電子材料、光学材料、および磁性材料
    • 電子工学および電気工学

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