Optical thin films consisting of nanoscale laminated layers

Shin Ichi Zaitsu, Takahisa Jitsuno, Masahiro Nakatsuka, Tatsuhiko Yamanaka, Shinji Motokoshi

研究成果: Contribution to journalArticle査読

56 被引用数 (Scopus)

抄録

The control of the refractive index of laminated coatings consisting of alternating stacks of nanoscale Al2O3 and TiO2 sublayers grown by atomic layer deposition has been achieved. The refractive index of the coating linearly changed from 1.870 to 2.318 as the thickness of the single TiO2 sublayer was varied from 2.0 to 39 Å while that of the single Al2O3 sublayer was kept constant at 5.5 Å. The refractive index could be varied by adjusting only the number of growth cycles of each material. This approach will have potential applications to optical multilayer coatings consisting of well-controlled extremely thin layers.

本文言語英語
ページ(範囲)2442-2444
ページ数3
ジャーナルApplied Physics Letters
80
14
DOI
出版ステータス出版済み - 4 8 2002
外部発表はい

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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