We developed a novel coating method using chemical reactions of gaseous reactants on a surface. A self-limiting nature of surface chemical reactions allows precisely controlled growth of films with high uniformity and controllability of thickness over large area. The nonuniformity of thickness distribution was under 1% over 240 mm in diameter. The film thickness had proportional relationship with a number of chemical reactions. TiO2 films at growth temperature of 25°C had a laser-induced damage threshold of 5 J/cm2 for 1-ns, 1.06-μm laser pulses. The laser damage resistance of TiO2 films decreased at higher growth temperature. TiO2 films grown at the high temperature had higher crystallinity. We clarified that the laser damages resulted from the local sites that absorbed the laser energy.
|ジャーナル||Proceedings of SPIE - The International Society for Optical Engineering|
|出版ステータス||出版済み - 1 1 2001|
|イベント||32nd Annual Boulder Damage Symposium - Laser-Induced Damaged in Optical Materials: 2000 - Boulder, CO, 米国|
継続期間: 10 16 2000 → 10 18 2000
All Science Journal Classification (ASJC) codes
- コンピュータ サイエンスの応用