Orientation stabilized rapid melting growth of thin (100) ge-on-insulator structures and their implementation in Homoepitaxial growth

Mohammad Anisuzzaman, Shunpei Muta, Abdul Manaf Hashim, Taizoh Sadoh

研究成果: Contribution to journalArticle

抜粋

Integration of Ge on the Si platforms is essential for the development of next generation large-scale integrated circuits. The Ge-on-insulator (GOI) structure is suited for the realization of high-mobility transistors channels and as epitaxial templates for optoelectronic and spintronic materials. In this work, the fabrication of thin (∼50 nm) (100) GOI by the rapid melting growth process has been investigated. Growth with unstable crystal orientation has been observed in wide (≥1 μm) GOI strips. However, orientation stabilized growth was achieved in narrow strips (∼0.5 μm). Further stabilization of growth orientation was observed in mesh patterned growth with GOI width of 1 μm. Epitaxial growth of Ge was performed on the above structures and the formation of uniform epitaxial layer was demonstrated.

元の言語英語
ページ(範囲)63-67
ページ数5
ジャーナルResearch Reports on Information Science and Electrical Engineering of Kyushu University
18
発行部数2
出版物ステータス出版済み - 1 1 2013
外部発表Yes

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Electrical and Electronic Engineering

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