Oxygen diffusion phenomena in BaTiO 3 ceramics doped with Ho of 5.2×10 18/cm3 were studied in order to reveal the effect of reduction thermal annealing. The samples were reduced at 850°C in a 3% H2-Ar atmosphere before the oxygen diffusion experiments. The oxygen diffusion was carried out in the temperature range of 700-800°C. The measurement of diffusion profiles and ion images revealed the oxygen defect distribution caused by the annealing. The results show that the grain boundary acts as a layer blocking oxygen diffusion when the diffusion temperature is below the reduction temperature of 850°C.
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