Oxygen tracer diffusion in a-axis oriented ZnO thin films grown on (011 2) sapphire by pulsed laser deposition

Isao Sakaguchi, Ken Watanabe, Yutaka Adachi, Takeshi Ohgaki, Shunichi Hishita, Naoki Ohashi, Hajime Haneda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

The a-axis oriented ZnO thin films deposited on (011 2) sapphire substrates by pulsed laser deposition were studied to investigate the effects of pre-annealing on oxygen diffusion. The effect was as follows: the oxygen diffusion coefficient decreased, and the oxygen concentration in the tailing regions of the profiles reduced. Ion images of an oxygen tracer revealed the high-diffusivity paths for oxygen tracer diffusion. The temperature dependence of oxygen tracer diffusion coefficients (Db) in as-deposited and pre-annealed thin films were determined to be Db [cm2/s] = 9.2×102 exp (-405 [kJ/mol] / RT) and Db [cm 2/s] = 1.8×103 exp (- 418 [kJ/mol] / RT), respectively. On basis of these results, the crystal orientation on D b and the mechanism for oxygen diffusion were discussed.

本文言語英語
ホスト出版物のタイトルElectroceramics in Japan XV
出版社Trans Tech Publications Ltd
ページ266-270
ページ数5
ISBN(印刷版)9783037857618
DOI
出版ステータス出版済み - 2013
外部発表はい
イベント31st Electronics Division Meeting of the Ceramic Society of Japan - Tokyo, 日本
継続期間: 10 28 201110 29 2011

出版物シリーズ

名前Key Engineering Materials
566
ISSN(印刷版)1013-9826
ISSN(電子版)1662-9795

その他

その他31st Electronics Division Meeting of the Ceramic Society of Japan
国/地域日本
CityTokyo
Period10/28/1110/29/11

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 材料力学
  • 機械工学

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