Partly three-dimensional global modeling of a silicon Czochralski furnace. I. Principles, formulation and implementation of the model

Lijun Liu, Koichi Kakimoto

研究成果: Contribution to journalArticle査読

110 被引用数 (Scopus)

抄録

A novel model for three-dimensional (3D) global simulation of heat transfer in a Czochralski (CZ) furnace for silicon crystal growth was proposed. Convective, conductive and radiative heat transfers in the furnace are solved together in a conjugated way by a finite control-volume method. A mixed 2D/3D space discretization technique was developed, and concepts of 2D domain and 3D domain for a CZ furnace were proposed. This technique enables 3D global simulations to be conducted with moderate requirements of computer memory and computation time. A 2D global simulation was carried out to obtain good initial conditions for 3D global modeling to speed up the global iteration. The model was demonstrated to be valid and reasonable.

本文言語英語
ページ(範囲)4481-4491
ページ数11
ジャーナルInternational Journal of Heat and Mass Transfer
48
21-22
DOI
出版ステータス出版済み - 10 2005

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes

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