Photoluminescent iron disilicide on modified Si surface by using silver

Kensuke Akiyama, Shinichi Motomura, Masaru Itakura, Yasuhiro Naganuma, Hiroshi Funakubo

研究成果: Contribution to journalArticle査読

5 被引用数 (Scopus)

抄録

Pronounced enhancement of photoluminescence (PL) intensity was observed from β-FeSi2 by using metal-organic chemical vapor deposition (MOCVD) on (100) Si substrates coated with a silver (Ag) layer. X-ray diffraction analysis revealed modifications to the crystal structure near the surface of Si, where the in-plane lattice parameter had been elongated, by Ag atomic diffusion from the surface to inside the Si during the heating process before deposition. This modified Si surface contributed to decreasing the non-radiative recombination centers at the β-FeSi2/Si interface and in the β-FeSi2 film, which led to the pronounced enhancement of PL intensity.

本文言語英語
論文番号07JB04
ジャーナルJapanese journal of applied physics
54
7
DOI
出版ステータス出版済み - 7 1 2015

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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