Planar-type thermoelectric micro devices using ceramic catalytic combustor

Woosuck Shin, Takaomi Nakashima, Maiko Nishibori, Noriya Izu, Toshio Itoh, Ichiro Matsubara

研究成果: Contribution to journalArticle査読

12 被引用数 (Scopus)

抄録

Thin-film couples of BiSbTe and Pt were deposited by RF sputtering and patterned by lift-off technique to form thermopile structures. To fabricate a planar micro-TE-generator, 11 thermopiles are connected in series as an array and Pt-loaded alumina ceramic catalyst was deposited on the thermopile as a combustor layer. The combustion and TE performance of the generator was investigated flowing 3 v/v% hydrogen in air into the test chamber; the average temperature gradient of eleven thermopiles developed between the hot and cold junctions of thermopiles was 50.6 K, and 1.9 μW of power was generated.

本文言語英語
ジャーナルCurrent Applied Physics
11
4 SUPPL.
DOI
出版ステータス出版済み - 7 1 2011
外部発表はい

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physics and Astronomy(all)

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