Plasma-cavitation pencil cutter for powerful micro-processing

Y. Arakawa, M. Ohmura, D. Tsujimoto, Y. Yamanishi

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We have successfully developed novel processing equipment based on the combined of cavitation and plasma irradiation. This technique uses the strong points of the powerful ablation of cavitation as well as plasma irradiation. The novelty of the technique enable to process not only conductive material but also non-conductive material such as polymer, CFRP (carbon fiber reinforced plastic) and silicon, which is unlike conventional wire electric discharge machine. Also, the directional transportation of bubbles provides positioning accuracy of micro-processing. The structure of the plasma-cavitation pencil cutter is low cost and very simple structure. This technology contributes to effective processing of wide range of materials such as metal plate, polymer, carbon-fiber and biomaterials.

本文言語英語
ホスト出版物のタイトル2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
出版社Institute of Electrical and Electronics Engineers Inc.
ページ521-524
ページ数4
ISBN(電子版)9781479989553
DOI
出版ステータス出版済み - 8 5 2015
外部発表はい
イベント18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, 米国
継続期間: 6 21 20156 25 2015

出版物シリーズ

名前2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

その他

その他18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country米国
CityAnchorage
Period6/21/156/25/15

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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