Polymerization in nanocrystalline diamond films by oxygen incorporation

Kungen Teii, Tomohiro Ikeda

研究成果: ジャーナルへの寄稿学術誌査読

5 被引用数 (Scopus)

抄録

Structure and resistivity of nanocrystalline diamond films deposited using microwave Ar-rich/O2/CH4 plasmas have been examined as a function of the O2/CH4 ratio from 0 to 0.53. Addition of O2 to Ar-rich/CH4 plasmas likely reduced the density of C2 radicals due to loss reactions of O atoms with CH4 and CHx radicals. The Raman peak of diamond at 1332 cm-1 was overlapped by the D peak of sp2-bonded, disordered carbon and its intensity was a little enhanced by the O2 addition, while the average size of sp2-bonded carbon clusters in nondiamond phases was increased. Oxygen was incorporated into the films in forms of C-O bonds, which bridged the carbon clusters themselves, and formed polymer-like, large-unit structures. The resistivity of the films was drastically increased from the order of 10-4 up to 104 Ω · m with a small O2 addition (1.2 vol.-% in total pressure), providing novel sensor and storage applications based on oxygen incorporation and desorption. A figure is presented. Decomposition of a Raman spectrum showing the diamond, D and G modes of amorphous carbon, and trans-polyacetylene peaks. The insert represents a typical SEM image showing a film surface.

本文言語英語
ページ(範囲)708-712
ページ数5
ジャーナルPlasma Processes and Polymers
3
9
DOI
出版ステータス出版済み - 11月 17 2006

!!!All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • ポリマーおよびプラスチック

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