Postgrowth of a Si contact layer on an air-exposed Si1-xGex/Si single quantum well grown by gas-source molecular beam epitaxy, for use in an electroluminescent device

Yoshimine Kato, S. Fukatsu, Y. Shiraki

研究成果: Contribution to journalArticle査読

12 被引用数 (Scopus)

抄録

A Si contact layer for an electroluminescent (EL) diode was successfully grown on a Si1-xGex/Si single quantum well (SQW) layer by 'hybrid' Si molecular beam epitaxy (MBE). The 'hybrid' MBE was performed by growing the Si contact layer in a solid-source MBE chamber after transferring the sample through air from a gas-source MBE (GSMBE) chamber in which the starting SQW layer was initially grown by using disilane (Si2H6) and germane (GeH4). The growth characteristics of the hybrid MBE were investigated by in situ monitoring of the reflection high energy electron diffraction. A (2×1) reconstruction was observed even after the sample was exposed to air for up to 15 h on a GSMBE-prepared Si(100) surface. Evidence of the excellent quality of the EL device was provided by the sharpest emission lines, a full width at half maximum of ≈5.5 meV. The spectra features of the EL and photoluminescence were found to be almost identical, and a well-resolved acoustic phonon replica was observed. Linear polarization for a no-phonon replica of EL was also observed along SQW plane.

本文言語英語
ページ(範囲)111-117
ページ数7
ジャーナルJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
13
1
DOI
出版ステータス出版済み - 1 1 1995
外部発表はい

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 電子工学および電気工学

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「Postgrowth of a Si contact layer on an air-exposed Si<sub>1-x</sub>Ge<sub>x</sub>/Si single quantum well grown by gas-source molecular beam epitaxy, for use in an electroluminescent device」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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