We succeeded in powerful noncontact actuation of magnetically driven microtool (MMT) by magnetizing it and focusing magnetic field in a microfluidic chip. Novelty of this paper is summarized as follows. (1) We employed neodium powder as the main component of MMT. The density of magnetic flux was improved about 100 times larger after magnetization. (2) We fabricated a pair of magnetic sharp needles in the chip by electroplating. MMT was placed between the needles and the density of magnetic flux was improved about 3 times larger. As a result, we succeeded in powerful actuation ofMVT in the chip. Drive frequency was improved about 10 times faster (up to 180Hz).
|ジャーナル||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|出版ステータス||出版済み - 2009|
|イベント||22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, イタリア|
継続期間: 1 25 2009 → 1 29 2009
All Science Journal Classification (ASJC) codes