TY - JOUR
T1 - Precise resistivity measurement of submicrometer-sized materials by using tem with microprobes
AU - Kawamoto, N.
AU - Murakami, Y.
AU - Shindo, D.
AU - Azehara, H.
AU - Tokumoto, H.
PY - 2009/6
Y1 - 2009/6
N2 - Precise electric resistivity measurements of submicrometer-sized materials have been demonstrated by using the piezodriving mechanics of two microprobes in a transmission electron microscope. By introducing two supplemental copper cables connected to a specimen, an electric circuit similar to that used in the four-terminal method was realized in a specimen holder with two microprobes. By using the proposed method, we determined the resistivity of a needle-shaped Pt-Ir specimen, whose resistance is only of the order of 0.10, with a satisfactory precision of <2 × 10-4 O. This method can be employed in microscopy studies on many submicrometer-sized and/or nanometer-sized materials.
AB - Precise electric resistivity measurements of submicrometer-sized materials have been demonstrated by using the piezodriving mechanics of two microprobes in a transmission electron microscope. By introducing two supplemental copper cables connected to a specimen, an electric circuit similar to that used in the four-terminal method was realized in a specimen holder with two microprobes. By using the proposed method, we determined the resistivity of a needle-shaped Pt-Ir specimen, whose resistance is only of the order of 0.10, with a satisfactory precision of <2 × 10-4 O. This method can be employed in microscopy studies on many submicrometer-sized and/or nanometer-sized materials.
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U2 - 10.2320/matertrans.M2009031
DO - 10.2320/matertrans.M2009031
M3 - Article
AN - SCOPUS:68149175204
VL - 50
SP - 1572
EP - 1575
JO - Materials Transactions
JF - Materials Transactions
SN - 0916-1821
IS - 6
ER -