Precise resistivity measurement of submicrometer-sized materials by using tem with microprobes

N. Kawamoto, Y. Murakami, D. Shindo, H. Azehara, H. Tokumoto

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)

抄録

Precise electric resistivity measurements of submicrometer-sized materials have been demonstrated by using the piezodriving mechanics of two microprobes in a transmission electron microscope. By introducing two supplemental copper cables connected to a specimen, an electric circuit similar to that used in the four-terminal method was realized in a specimen holder with two microprobes. By using the proposed method, we determined the resistivity of a needle-shaped Pt-Ir specimen, whose resistance is only of the order of 0.10, with a satisfactory precision of <2 × 10-4 O. This method can be employed in microscopy studies on many submicrometer-sized and/or nanometer-sized materials.

本文言語英語
ページ(範囲)1572-1575
ページ数4
ジャーナルMaterials Transactions
50
6
DOI
出版ステータス出版済み - 6 2009
外部発表はい

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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