Preparation of indium oxide thin film by spin-coating method and its gas-sensing properties

Wan Young Chung, Go Sakai, Kengo Shimanoe, Norio Miura, Duk Dong Lee, Noboru Yamazoe

研究成果: Contribution to journalArticle査読

127 被引用数 (Scopus)

抄録

Thin films of In2O3 were fabricated on an alumina substrate by spin-coating of an aqueous solution prepared from In(OH)3, acetic acid and ammonium carboxymethyl cellulose, followed by drying at 110°C and calcining at 600°C. As observed by SEM, the films consisted of a dense stack of tiny In2O3 particles (23-27 nm in diameter) and covered large grains of the alumina substrate well. Subsequently, film thickness was well controlled by the number of spin-coatings. Gas sensing properties were strongly dependent on the film thickness and temperature and fairly excellent sensing performances to H2, CO and C3H8 were obtained with a 160 nm-thick film (5 times coated) at 350°C.

本文言語英語
ページ(範囲)139-145
ページ数7
ジャーナルSensors and Actuators, B: Chemical
46
2-3
DOI
出版ステータス出版済み - 2 15 1998

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学
  • 材料化学

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