TY - JOUR
T1 - Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture
AU - Suda, Yoshiaki
AU - Kawasaki, Hiroharu
AU - Ueda, Tsuyoshi
AU - Ohshima, Tamiko
N1 - Funding Information:
This work was supported in part by the Grant-in-Aid for Young Scientists (A), Grant-in-Aid for Scientific Research on Priority Areas (417), Grant-in-Aid for Scientific Research (B) and a Research Fund from Nagasaki Super Technology Development Association. The authors wish to thank Dr. K. Ebihara and Dr. T. Ikegami of Kumamoto University for their helpful discussions. The authors also wish to thank Dr. H. Abe and Mr. H. Yoshida of the Ceramic Research Center of Nagasaki for their technical assistance with the experimental data.
PY - 2005/3/22
Y1 - 2005/3/22
N2 - Nitrogen-doped titanium oxide photocatalysts, which were reported to be activated by visible light irradiation as well as ultraviolet irradiation, have been prepared by pulsed laser deposition method using Ti, TiO, TiO2 and TiN targets in nitrogen/oxygen gas mixture. As a result, it is found that film properties such as color, crystalline structure and atomic composition rate strongly depend on the target material and nitrogen concentration ratio in the gas mixture. It is also suggested that these films under UV light irradiation exhibit almost the same decomposition ability of methylene blue. However, the photocatalytic activity of the nitrogen-doped TiO2 film prepared using TiN target is higher than that of the other films prepared by Ti, TiO and TiO2 targets under normal fluorescent light irradiation.
AB - Nitrogen-doped titanium oxide photocatalysts, which were reported to be activated by visible light irradiation as well as ultraviolet irradiation, have been prepared by pulsed laser deposition method using Ti, TiO, TiO2 and TiN targets in nitrogen/oxygen gas mixture. As a result, it is found that film properties such as color, crystalline structure and atomic composition rate strongly depend on the target material and nitrogen concentration ratio in the gas mixture. It is also suggested that these films under UV light irradiation exhibit almost the same decomposition ability of methylene blue. However, the photocatalytic activity of the nitrogen-doped TiO2 film prepared using TiN target is higher than that of the other films prepared by Ti, TiO and TiO2 targets under normal fluorescent light irradiation.
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U2 - 10.1016/j.tsf.2004.07.047
DO - 10.1016/j.tsf.2004.07.047
M3 - Article
AN - SCOPUS:13444261001
VL - 475
SP - 337
EP - 341
JO - Thin Solid Films
JF - Thin Solid Films
SN - 0040-6090
IS - 1-2 SPEC. ISS.
ER -