Preparation of PbZrxTi1-xO3 thin films by KrF excimer laser ablation technique

Hiromitsu Kurogi, Yukihiko Yamagata, Tomoaki Ikegami, Kenji Ebihara, Yin Tong Bok

研究成果: ジャーナルへの寄稿会議記事査読

4 被引用数 (Scopus)


A pulsed KrF excimer laser was used to ablate PZT thin films. The composition, crystallization, and ferroelectric properties of the PZT thin films prepared under various conditions were investigated. X ray diffraction (XRD) patterns showed that the PZT thin films prepared on MgO(100) substrates had a perovskite - pyrochlore mixed structure. The condition of 100 mTorr oxygen pressure provides high quality perovskite films. It was also found that the stoichiometric condition of the deposited films was obtained in ambient oxygen of 100 to approximately 400 mTorr. The ferroelectric properties of the Pt/PZT/Pt/MgO structure were also studied. The capacitance-voltage characteristics and the corresponding hysteresis loop of the dielectric-electric field curve are discussed.

ジャーナルMaterials Research Society Symposium - Proceedings
出版ステータス出版済み - 1996
イベントProceedings of the 1996 MRS Spring Symposium - San Francisco, CA, USA
継続期間: 4月 7 19964月 12 1996

!!!All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学


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