TY - JOUR
T1 - Preparation of PZT/YBCO/YAlO heterostructure thin films by KrF excimer laser ablation
AU - Ebihara, Kenji
AU - Kurogi, Hiromitsu
AU - Yamagata, Yukihiko
AU - Ikegami, Tomoaki
AU - Grishin, Alexander M.
PY - 1998/12/1
Y1 - 1998/12/1
N2 - The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.
AB - The perovskite oxide YBa2Cu3O7-X (YBCO) and Pb(ZrXTi1-X)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600 m Torr O2, 2-3 J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82 K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80 kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.
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M3 - Conference article
AN - SCOPUS:0032317748
SN - 0272-9172
VL - 526
SP - 193
EP - 198
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1998 MRS Spring Meeting
Y2 - 13 April 1998 through 16 April 1998
ER -