As-grown thin films of YBa2Cu3O7-y with a smooth surface were obtained on lattice-matched NdGaO3 substrates by ArF laser ablation deposition. The as-grown thin film has a zero-resistance temperature (Tc) at 90 K. The full width at half-maximum (FWHM) of the X-ray diffraction peak (005) of the thin film was as narrow as 0.12 degrees. These results suggest that the as-grown YBa2Cu3O7-y films on NdGaO3 substrates were high-quality single crystals. NdGaO3 substrates are thought to be a promising substrate for epitaxial growth of YBa2Cu3O7-y high Tc thin films.
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