The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H 7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH 2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 10 4 to 108 Ωcm by the fibrous material with a different preparation condition.
|ジャーナル||Journal of Physics: Conference Series|
|出版ステータス||出版済み - 2013|
|イベント||15th International Conference on Thin Films, ICTF 2011 - Kyoto, 日本|
継続期間: 11月 8 2011 → 11月 11 2011
!!!All Science Journal Classification (ASJC) codes