Preparation of ZnO thin films by MO-CVD using fibrous bis (acetylacetonato) zinc (II) and ozone

K. Haga, S. Abe, Y. Takizawa, K. Yubuta, T. Shishido

研究成果: ジャーナルへの寄稿会議記事査読


The fibrous bis (acetylacetonato) zinc (II) (Zn(C5H 7O2)2·xH2O) was prepared with novel apparatus involved the vaporization and the recrystallization, and was investigated by differential thermal analysis (DTA), flourier transform infrared spectroscopy (FT-IR) with attenuated total reflection (ATR), and the inductively coupled plasma optical emission spectroscopy (ICP-OES). The zinc oxide (ZnO) films were prepared by the low-pressure CVD (LP-CVD) using the fibrous Zn(C5H7O2)2·xH 2O and ozone(O3). The DTA curve of the fibrous material with a wide-ranging endothermic peak under 100°C according to desorption of the hydrated water separated to two peaks decreasing in the evaporation temperature. The resistivity of the ZnO films has changed widely from 10 4 to 108 Ωcm by the fibrous material with a different preparation condition.

ジャーナルJournal of Physics: Conference Series
出版ステータス出版済み - 2013
イベント15th International Conference on Thin Films, ICTF 2011 - Kyoto, 日本
継続期間: 11月 8 201111月 11 2011

!!!All Science Journal Classification (ASJC) codes

  • 物理学および天文学(全般)


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