Probing technique using circular motion of a microsphere controlled by optical pressure for a nanocoordinate measuring machine

Masaki Michihata, Yuto Nagasaka, Terutake Hayashi, Yasuhiro Takaya

研究成果: ジャーナルへの寄稿学術誌査読

15 被引用数 (Scopus)

抄録

A new surface probing technique using the circular motion of an optically-trapped microsphere is proposed for a nanocoordinate measuring system. The probe sphere is oscillated circularly in the plane perpendicular to the probe axis and the circular orbit of the probe sphere is monitored for the detection of the position and normal vector direction of the surface. The principle of detection is based on changes in the circular orbit of the microsphere. When the probe approaches a work surface, the orbit of the probe sphere becomes elliptical. The minor-axis length and the minor-axis angle of the ellipse are then used as parameters to detect the position and normal vector direction of the surface, respectively. In this study, the circular motion probe is shown to have a resolution of position detection of 39 nm, and the accuracy of measuring a normal vector to the surface is on the order of 3 °.

本文言語英語
ページ(範囲)198-205
ページ数8
ジャーナルApplied Optics
48
2
DOI
出版ステータス出版済み - 1月 10 2009
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 原子分子物理学および光学
  • 工学(その他)
  • 電子工学および電気工学

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