Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source

Koji Tamaru, Daisuke Nakamura, Akihiro Takahashi, Tatsuo Okada

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

A new metal droplet generator is proposed and tested. In this study, Sn droplets are generated for an laser-produced plasma extreme-ultraviolet light source at 13.5 nm that is used in the next generation optical lithography system. The droplet generator can produce Sn droplets as small as 15 μm on demand.

元の言語英語
ホスト出版物のタイトルConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
出版者Optical Society of America
ISBN(印刷物)1424411742, 9781424411740
出版物ステータス出版済み - 1 1 2007
イベントConference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 - Seoul, 大韓民国
継続期間: 8 26 20078 26 2007

出版物シリーズ

名前Optics InfoBase Conference Papers
ISSN(電子版)2162-2701

その他

その他Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007
大韓民国
Seoul
期間8/26/078/26/07

Fingerprint

Laser produced plasmas
laser plasmas
debris
Debris
Light sources
light sources
generators
ultraviolet radiation
lithography
Gas generators
Photolithography
metals
Metals

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

これを引用

Tamaru, K., Nakamura, D., Takahashi, A., & Okada, T. (2007). Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007 (Optics InfoBase Conference Papers). Optical Society of America.

Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. / Tamaru, Koji; Nakamura, Daisuke; Takahashi, Akihiro; Okada, Tatsuo.

Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).

研究成果: 著書/レポートタイプへの貢献会議での発言

Tamaru, K, Nakamura, D, Takahashi, A & Okada, T 2007, Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optics InfoBase Conference Papers, Optical Society of America, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007, Seoul, 大韓民国, 8/26/07.
Tamaru K, Nakamura D, Takahashi A, Okada T. Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. : Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America. 2007. (Optics InfoBase Conference Papers).
Tamaru, Koji ; Nakamura, Daisuke ; Takahashi, Akihiro ; Okada, Tatsuo. / Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source. Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, 2007. (Optics InfoBase Conference Papers).
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