Progress with MEMS X-ray micro pore optics

Yuichiro Ezoea, Teppei Moriyama, Tomohiro Ogawa, Takuya Kakiuchi, Takaya Ohashi, Ikuyuki Mitsuishi, Kazuhisa Mitsuda, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

2 被引用数 (Scopus)

抄録

Our development of ultra light-weight X-ray micro pore optics based on MEMS (Micro Electro Mechanical System) technologies is described. Using dry etching or X-ray lithography and electroplating, curvilinear sidewalls through a flat wafer are fabricated. Sidewalls vertical to the wafer surface are smoothed by use of high temperature annealing and/or magnetic field assisted finishing to work as X-ray mirrors. The wafer is then deformed to a spherical shape. When two spherical wafers with different radii of curvature are stacked, the combined system will be an approximated Wolter type-I telescope. This method in principle allows high angular resolution and ultra light-weight X-ray micro pore optics. In this paper, performance of a single-stage optic, coating of a heavy metal on sidewalls with atomic layer deposition, and assembly of a Wolter type-I telescope are reported.

本文言語英語
ホスト出版物のタイトルSpace Telescopes and Instrumentation 2012
ホスト出版物のサブタイトルUltraviolet to Gamma Ray
DOI
出版ステータス出版済み - 12 1 2012
外部発表はい
イベントSpace Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray - Amsterdam, オランダ
継続期間: 7 1 20127 6 2012

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8443
ISSN(印刷版)0277-786X

その他

その他Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray
Countryオランダ
CityAmsterdam
Period7/1/127/6/12

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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