Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond

Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Tsuyoshi Yoshitake, Hiroshi Ikenoue, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune

研究成果: ジャーナルへの寄稿記事

抄録

We propose a simple and easy electrode formation technique on nanopolycrystalline diamond (NPD) synthesized by a high-temperature and high-pressure technique. The stronger light absorption nature of NPD than of standard transparent diamond enables the laser irradiation process on NPD. Pulsed laser irradiation using an ArF excimer laser under atmospheric condition drastically reduced the resistance of the NPD surface by forming graphite. Repetition of the laser irradiation reduced the resistance, showing a resistance of 300 Ω for the laser-irradiated area of 100 × 150 μm 2 . These results indicate the applicability of pulsed laser irradiation to an NPD apparatus having a conductive electrode, as well as electronic device processes.

元の言語英語
記事番号118004
ジャーナルJapanese Journal of Applied Physics
57
発行部数11
DOI
出版物ステータス出版済み - 11 1 2018

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Laser beam effects
Pulsed lasers
Diamonds
pulsed lasers
diamonds
irradiation
lasers
Electrodes
electrodes
Excimer lasers
meteorology
electromagnetic absorption
excimer lasers
Light absorption
repetition
Graphite
graphite
Lasers
electronics

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond. / Fukuta, Rei; Yamamoto, Naoya; Ishikawa, Fumitaro; Matsushita, Masafumi; Yoshitake, Tsuyoshi; Ikenoue, Hiroshi; Ohfuji, Hiroaki; Shinmei, Toru; Irifune, Tetsuo.

:: Japanese Journal of Applied Physics, 巻 57, 番号 11, 118004, 01.11.2018.

研究成果: ジャーナルへの寄稿記事

Fukuta, Rei ; Yamamoto, Naoya ; Ishikawa, Fumitaro ; Matsushita, Masafumi ; Yoshitake, Tsuyoshi ; Ikenoue, Hiroshi ; Ohfuji, Hiroaki ; Shinmei, Toru ; Irifune, Tetsuo. / Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond. :: Japanese Journal of Applied Physics. 2018 ; 巻 57, 番号 11.
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AU - Fukuta, Rei

AU - Yamamoto, Naoya

AU - Ishikawa, Fumitaro

AU - Matsushita, Masafumi

AU - Yoshitake, Tsuyoshi

AU - Ikenoue, Hiroshi

AU - Ohfuji, Hiroaki

AU - Shinmei, Toru

AU - Irifune, Tetsuo

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AB - We propose a simple and easy electrode formation technique on nanopolycrystalline diamond (NPD) synthesized by a high-temperature and high-pressure technique. The stronger light absorption nature of NPD than of standard transparent diamond enables the laser irradiation process on NPD. Pulsed laser irradiation using an ArF excimer laser under atmospheric condition drastically reduced the resistance of the NPD surface by forming graphite. Repetition of the laser irradiation reduced the resistance, showing a resistance of 300 Ω for the laser-irradiated area of 100 × 150 μm 2 . These results indicate the applicability of pulsed laser irradiation to an NPD apparatus having a conductive electrode, as well as electronic device processes.

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