Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond

Rei Fukuta, Naoya Yamamoto, Fumitaro Ishikawa, Masafumi Matsushita, Tsuyoshi Yoshitake, Hiroshi Ikenoue, Hiroaki Ohfuji, Toru Shinmei, Tetsuo Irifune

研究成果: Contribution to journalArticle査読

1 被引用数 (Scopus)

抄録

We propose a simple and easy electrode formation technique on nanopolycrystalline diamond (NPD) synthesized by a high-temperature and high-pressure technique. The stronger light absorption nature of NPD than of standard transparent diamond enables the laser irradiation process on NPD. Pulsed laser irradiation using an ArF excimer laser under atmospheric condition drastically reduced the resistance of the NPD surface by forming graphite. Repetition of the laser irradiation reduced the resistance, showing a resistance of 300 Ω for the laser-irradiated area of 100 × 150 μm2. These results indicate the applicability of pulsed laser irradiation to an NPD apparatus having a conductive electrode, as well as electronic device processes.

本文言語英語
論文番号118004
ジャーナルJapanese journal of applied physics
57
11
DOI
出版ステータス出版済み - 11 2018

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(全般)

フィンガープリント

「Pulsed laser irradiation as a process of conductive surface formation on nanopolycrystalline diamond」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル