Real-time monitoring of surface passivation of crystalline silicon during growth of amorphous and epitaxial silicon layer
Shota Nunomura, Isao Sakata, Hajime Sakakita, Kazunori Koga, Masaharu Shiratani
研究成果: ジャーナルへの寄稿 › 学術誌 › 査読
6
被引用数
(Scopus)