Reduction of liquid bridge force for 3D microstructure measurements

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda

研究成果: ジャーナルへの寄稿記事

4 引用 (Scopus)

抄録

Recent years have witnessed an increased demand for a method for precise measurement of the microstructures of mechanical microparts, microelectromechanical systems, micromolds, optical devices, microholes, etc. This paper presents a measurement system for three-dimensional (3D) microstructures that use an optical fiber probe. This probe consists of a stylus shaft with a diameter of 2.5 μm and a glass ball with a diameter of 5 μm attached to the stylus tip. In this study, the measurement system, placed in a vacuum vessel, is constructed suitably to prevent adhesion of the stylus tip to the measured surface caused by the surface force resulting from the van der Waals force, electrostatic force, and liquid bridge force. First, these surface forces are analyzed with the aim of investigating the causes of adhesion. Subsequently, the effects of pressure inside the vacuum vessel on surface forces are evaluated. As a result, it is found that the surface force is 0.13 μN when the pressure inside the vacuum vessel is 350 Pa. This effect is equivalent to a 60% reduction in the surface force in the atmosphere.

元の言語英語
記事番号153
ジャーナルApplied Sciences (Switzerland)
6
発行部数5
DOI
出版物ステータス出版済み - 1 1 2016

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liquid bridges
microstructure
Microstructure
Liquids
vessels
Vacuum
vacuum
Adhesion
adhesion
Van der Waals forces
Electrostatic force
Optical devices
probes
MEMS
Optical fibers
microelectromechanical systems
balls
optical fibers
Glass
electrostatics

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Instrumentation
  • Engineering(all)
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes

これを引用

Reduction of liquid bridge force for 3D microstructure measurements. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao; Fukuda, Mitsuyoshi.

:: Applied Sciences (Switzerland), 巻 6, 番号 5, 153, 01.01.2016.

研究成果: ジャーナルへの寄稿記事

Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao ; Fukuda, Mitsuyoshi. / Reduction of liquid bridge force for 3D microstructure measurements. :: Applied Sciences (Switzerland). 2016 ; 巻 6, 番号 5.
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