Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide

Isao Sakaguchi, Kenji Matsumoto, Takeshi Ohgaki, Shunichi Hishita, Yutaka Adachi, Tsubasa Nakagawa, Ken Watanabe, Naoki Ohashi, Hajime Haneda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

1 引用 (Scopus)

抜粋

The relationship between Al and Li during diffusion was studied using Al-implanted ZnO. The Al donor in ZnO acts to increase the concentration of Li contamination from the atmosphere during the annealing. It is difficult to decompose the relationship formed by diffusion between Al and Li during high-temperature annealing. The most effective method to decompose the relationship is to anneal the as-implanted ZnO at a pressure of 5×10 -3 torr. This annealing increases the Al solubility limit because the ZnO surface evaporates.

元の言語英語
ホスト出版物のタイトルElectroceramics in Japan XIII
出版者Trans Tech Publications Ltd
ページ205-208
ページ数4
ISBN(印刷物)9780878492640
DOI
出版物ステータス出版済み - 1 1 2010

出版物シリーズ

名前Key Engineering Materials
445
ISSN(印刷物)1013-9826
ISSN(電子版)1662-9795

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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  • これを引用

    Sakaguchi, I., Matsumoto, K., Ohgaki, T., Hishita, S., Adachi, Y., Nakagawa, T., Watanabe, K., Ohashi, N., & Haneda, H. (2010). Relationship between aluminum and lithium and annealing for reducing lithium contamination in aluminum-implanted zinc oxide. : Electroceramics in Japan XIII (pp. 205-208). (Key Engineering Materials; 巻数 445). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/KEM.445.205