Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates

Koichi Matsushima, Masaharu Shiratani, Naho Itagaki

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

3 被引用数 (Scopus)

抄録

We have studied effects of deposition temperature on electrical properties of (ZnO)x(InN)1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm-3 to 3.4×1019 cm-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.

本文言語英語
ホスト出版物のタイトル16th International Conference on Nanotechnology - IEEE NANO 2016
出版社Institute of Electrical and Electronics Engineers Inc.
ページ674-675
ページ数2
ISBN(電子版)9781509039142
DOI
出版ステータス出版済み - 11 21 2016
イベント16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, 日本
継続期間: 8 22 20168 25 2016

出版物シリーズ

名前16th International Conference on Nanotechnology - IEEE NANO 2016

その他

その他16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
国/地域日本
CitySendai
Period8/22/168/25/16

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学

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