Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates

Koichi Matsushima; Masaharu Shiratani; Naho Itagaki

doi:10.1109/NANO.2016.7751421

Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates

Koichi Matsushima, Masaharu Shiratani, Naho Itagaki

電子デバイス工学

研究成果: Chapter in Book/Report/Conference proceeding › Conference contribution

3 被引用数 (Scopus)

抄録

We have studied effects of deposition temperature on electrical properties of (ZnO)_x(InN)_1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm²/Vs to 70 cm²/Vs and the carrier density increases from 1.8×10¹⁹ cm^-3 to 3.4×10¹⁹ cm^-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.

本文言語	英語
ホスト出版物のタイトル	16th International Conference on Nanotechnology - IEEE NANO 2016
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	674-675
ページ数	2
ISBN（電子版）	9781509039142
DOI	https://doi.org/10.1109/NANO.2016.7751421
出版ステータス	出版済み - 11 21 2016
イベント	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, 日本継続期間: 8 22 2016 → 8 25 2016

出版物シリーズ

名前	16th International Conference on Nanotechnology - IEEE NANO 2016

その他

その他	16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
国/地域	日本
City	Sendai
Period	8/22/16 → 8/25/16

All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
原子分子物理学および光学

文献へのアクセス

10.1109/NANO.2016.7751421

他のファイルとリンク

フィンガープリント

「Relationship between electric properties and surface flatness of (ZnO)<sub>x</sub>(InN)<sub>1-x</sub> films on ZnO templates」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

Matsushima, K., Shiratani, M., & Itagaki, N. (2016). Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates. In 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 674-675). [7751421] (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751421

Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates. / Matsushima, Koichi; Shiratani, Masaharu ; Itagaki, Naho.

16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 674-675 7751421 (16th International Conference on Nanotechnology - IEEE NANO 2016).

研究成果: Chapter in Book/Report/Conference proceeding › Conference contribution

Matsushima, K, Shiratani, M & Itagaki, N 2016, Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates. in 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751421, 16th International Conference on Nanotechnology - IEEE NANO 2016, Institute of Electrical and Electronics Engineers Inc., pp. 674-675, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, 日本, 8/22/16. https://doi.org/10.1109/NANO.2016.7751421

Matsushima K, Shiratani M , Itagaki N. Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates. In 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 674-675. 7751421. (16th International Conference on Nanotechnology - IEEE NANO 2016). https://doi.org/10.1109/NANO.2016.7751421

Matsushima, Koichi ; Shiratani, Masaharu ; Itagaki, Naho. / Relationship between electric properties and surface flatness of (ZnO)_x(InN)_1-x films on ZnO templates. 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 674-675 (16th International Conference on Nanotechnology - IEEE NANO 2016).

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title = "Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates",

abstract = "We have studied effects of deposition temperature on electrical properties of (ZnO)x(InN)1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm-3 to 3.4×1019 cm-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.",

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N2 - We have studied effects of deposition temperature on electrical properties of (ZnO)x(InN)1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm-3 to 3.4×1019 cm-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.

AB - We have studied effects of deposition temperature on electrical properties of (ZnO)x(InN)1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm-3 to 3.4×1019 cm-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.

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