Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates

Koichi Matsushima, Masaharu Shiratani, Naho Itagaki

研究成果: 著書/レポートタイプへの貢献会議での発言

2 引用 (Scopus)

抄録

We have studied effects of deposition temperature on electrical properties of (ZnO)x(InN)1-x (ZION) films on ZnO templates. With increasing the deposition temperature from RT to 450°C, the electron mobility decreases from 93 cm2/Vs to 70 cm2/Vs and the carrier density increases from 1.8×1019 cm-3 to 3.4×1019 cm-3. Furthermore, we found a correlation between electrical properties and root mean square (RMS) roughness of the films. These results suggest the surface flatness is an important parameter to determine electrical properties of ZION films.

元の言語英語
ホスト出版物のタイトル16th International Conference on Nanotechnology - IEEE NANO 2016
出版者Institute of Electrical and Electronics Engineers Inc.
ページ674-675
ページ数2
ISBN(電子版)9781509039142
DOI
出版物ステータス出版済み - 11 21 2016
イベント16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, 日本
継続期間: 8 22 20168 25 2016

出版物シリーズ

名前16th International Conference on Nanotechnology - IEEE NANO 2016

その他

その他16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
日本
Sendai
期間8/22/168/25/16

Fingerprint

flatness
Electric properties
templates
electrical properties
Electron mobility
electron mobility
Carrier concentration
roughness
Surface roughness
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics

これを引用

Matsushima, K., Shiratani, M., & Itagaki, N. (2016). Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates. : 16th International Conference on Nanotechnology - IEEE NANO 2016 (pp. 674-675). [7751421] (16th International Conference on Nanotechnology - IEEE NANO 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2016.7751421

Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates. / Matsushima, Koichi; Shiratani, Masaharu; Itagaki, Naho.

16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. p. 674-675 7751421 (16th International Conference on Nanotechnology - IEEE NANO 2016).

研究成果: 著書/レポートタイプへの貢献会議での発言

Matsushima, K, Shiratani, M & Itagaki, N 2016, Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates. : 16th International Conference on Nanotechnology - IEEE NANO 2016., 7751421, 16th International Conference on Nanotechnology - IEEE NANO 2016, Institute of Electrical and Electronics Engineers Inc., pp. 674-675, 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016, Sendai, 日本, 8/22/16. https://doi.org/10.1109/NANO.2016.7751421
Matsushima K, Shiratani M, Itagaki N. Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates. : 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc. 2016. p. 674-675. 7751421. (16th International Conference on Nanotechnology - IEEE NANO 2016). https://doi.org/10.1109/NANO.2016.7751421
Matsushima, Koichi ; Shiratani, Masaharu ; Itagaki, Naho. / Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates. 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 674-675 (16th International Conference on Nanotechnology - IEEE NANO 2016).
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