Relationship between resolution and rotation stage in imaging X-ray CT

Masakazu Kobayashi, Yoshihiko Sugihara, Hiroyuki Toda, Kentaro Uesugi

研究成果: Contribution to journalArticle査読

抄録

In this study, evaluation of precision in rotation stage and investigation of effect of rotation stage blurring on resolution are performed in imaging X-ray tomography set-up, which allows nano-scale observation, for the purpose of improving resolution in X-ray tomography. In the result of precision evaluation of rotation stage in high-resolution imaging X-ray tomography, fluctuation, which was approximately 35 nm in maximum and approximately 13 nm in average, was found. This fluctuation was under 1 pixel. In the simulation that analyzed effect of fluctuation in rotation stage, it was found that long periodic fluctuation deteriorate reconstructed image terribly. But, impulse-like fluctuation does not almost affect reconstructed image quality. However, reconstructed image is deteriorated when the frequency of impulse-like fluctuation increase. If long periodic fluctuation, which was observed in the precision evaluation, is corrected, the resolution improvement was confirmed though the fluctuation was less than 1 pixel.

本文言語英語
ページ(範囲)273-278
ページ数6
ジャーナルKeikinzoku/Journal of Japan Institute of Light Metals
63
8
DOI
出版ステータス出版済み - 2013
外部発表はい

All Science Journal Classification (ASJC) codes

  • 材料力学
  • 機械工学
  • 金属および合金
  • 材料化学

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