抄録
A selective-area impurity-doped planar edge-coupled waveguide photodiode (SIMPLE-WGPD) has a long lifetime for subscriber system use and the device life is determined by the perimeter of the pn-junction. The thickness of the absorption layer is 3 μm. The pn-junction is formed at the absorption layer by means of Zn diffusion from the surface. The facet at which the input light received is formed by cleavage and coated with SiN, filmed formed by plasma enhanced chemical vapor deposition. The responsivity is about 0.8 A/W at bias of -2 V. On these SIMPLE-WGPDs, several kinds of reliability tests were performed.
本文言語 | 英語 |
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ページ数 | 1 |
出版ステータス | 出版済み - 1 1 1997 |
外部発表 | はい |
イベント | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim - Chiba, Jpn 継続期間: 7 14 1997 → 7 18 1997 |
その他
その他 | Proceedings of the 1997 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim |
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City | Chiba, Jpn |
Period | 7/14/97 → 7/18/97 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Electrical and Electronic Engineering