TY - JOUR
T1 - Reverse bias dependent impedance and dielectric properties of Al/n-NC FeSi2/p-Si/Pd heterostructures formed by facing-targets sputtering
AU - Borwornpornmetee, Nattakorn
AU - Chaleawpong, Rawiwan
AU - Charoenyuenyao, Peerasil
AU - Nopparuchikun, Adison
AU - Paosawatyanyong, Boonchoat
AU - Sittimart, Phongsaphak
AU - Yoshitake, Tsuyoshi
AU - Promros, Nathaporn
N1 - Funding Information:
The allowance for carrying out this research was provided by the Academic Research Fund, Faculty of Science, King Mongkut's Institute of Technology Ladkrabang (grant numbers 2562-01-05-29, 2562-01-05-44, and 2563-02-05-36). The authors also express their gratitude for the contributions and cooperation received from the Integrated Science for Electronic, Material, and Industry Research Unit.
Funding Information:
The allowance for carrying out this research was provided by the Academic Research Fund, Faculty of Science, King Mongkut's Institute of Technology Ladkrabang (grant numbers 2562-01-05-29 , 2562-01-05-44 , and 2563-02-05-36 ). The authors also express their gratitude for the contributions and cooperation received from the Integrated Science for Electronic, Material, and Industry Research Unit.
Publisher Copyright:
© 2022
PY - 2022/8/1
Y1 - 2022/8/1
N2 - Al/n-NC FeSi2/p-Si/Pd heterostructures were formed by facing-targets sputtering. From the dark J-V results, the device showed rectifying action with leakage current. In this work, impedance spectroscopy was employed to study the electrochemical characteristics of the heterostructures, which were inspected within a frequency (f) range from 20 Hz to 2 MHz. The range of the biased voltage (V) was −1 V to 0 V. All plots of real and imaginary impedances possessed single semi-circular arcs for all bias V values. The relaxation time was 2.00 μs at −1 V, and it became faster at 0 V with 0.42 μs. The equivalent circuit for the heterostructures consisted of series resistance (Rs) combined with three sets of shunt circuits of resistance (Rp) and a constant phase element (CPE), representing grain, grain boundary, and junction, respectively. The simulated Rs and Rp values decreased, while all CPE values increased as the biased V increased. For the dielectric properties, the real permittivity (ε′) values of 86.70 at 0 V and 20.22 at −1 V were disclosed at 100 Hz; all ε′ values decreased as the f value was increased. The loss tangent revealed to be very high due to dielectric loss being much higher than ε′ values, indicating the device to be leaky. The alternating conductivities plotted against f started at a low level in low f zones and grew exponentially when f reached higher values for all V values. Direct current conductivity was observed at 1.66 × 10−4 S m−1 at 0 V, which reduced to 2.67 × 10−5 S m−1 at −1 V. The dimensionless exponent of the conductivity results was higher than 1, indicating the hopping movement within the local site.
AB - Al/n-NC FeSi2/p-Si/Pd heterostructures were formed by facing-targets sputtering. From the dark J-V results, the device showed rectifying action with leakage current. In this work, impedance spectroscopy was employed to study the electrochemical characteristics of the heterostructures, which were inspected within a frequency (f) range from 20 Hz to 2 MHz. The range of the biased voltage (V) was −1 V to 0 V. All plots of real and imaginary impedances possessed single semi-circular arcs for all bias V values. The relaxation time was 2.00 μs at −1 V, and it became faster at 0 V with 0.42 μs. The equivalent circuit for the heterostructures consisted of series resistance (Rs) combined with three sets of shunt circuits of resistance (Rp) and a constant phase element (CPE), representing grain, grain boundary, and junction, respectively. The simulated Rs and Rp values decreased, while all CPE values increased as the biased V increased. For the dielectric properties, the real permittivity (ε′) values of 86.70 at 0 V and 20.22 at −1 V were disclosed at 100 Hz; all ε′ values decreased as the f value was increased. The loss tangent revealed to be very high due to dielectric loss being much higher than ε′ values, indicating the device to be leaky. The alternating conductivities plotted against f started at a low level in low f zones and grew exponentially when f reached higher values for all V values. Direct current conductivity was observed at 1.66 × 10−4 S m−1 at 0 V, which reduced to 2.67 × 10−5 S m−1 at −1 V. The dimensionless exponent of the conductivity results was higher than 1, indicating the hopping movement within the local site.
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U2 - 10.1016/j.mssp.2022.106641
DO - 10.1016/j.mssp.2022.106641
M3 - Article
AN - SCOPUS:85127313157
SN - 1369-8001
VL - 146
JO - Materials Science in Semiconductor Processing
JF - Materials Science in Semiconductor Processing
M1 - 106641
ER -