Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines

M. Nakano, S. Sato, F. Yamashita, T. Honda, J. Yamasaki, K. Ishiyama, M. Itakura, J. Fidler, T. Yanai, H. Fukunaga

研究成果: ジャーナルへの寄稿学術誌査読

30 被引用数 (Scopus)

抄録

Isotropic Nd-Fe-B thick film magnets were prepared by a high-speed pulsed laser deposition method followed by a post annealing. The deposition rate of 90 μm/h could be successfully achieved, and a pulse annealing was adopted as the post annealing process in order to enhance coercivity. Use of a substrate heating system under the high deposition rate enabled us to obtain anisotropic thick films with (BH)max of approximately 120 kJ/m3, which show the potential for an improvement in the properties of the micromachines. Novel micromachines comprising the Isotropic films were introduced.

本文言語英語
ページ(範囲)2672-2676
ページ数5
ジャーナルIEEE Transactions on Magnetics
43
6
DOI
出版ステータス出版済み - 6月 2007

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

フィンガープリント

「Review of fabrication and characterization of Nd-Fe-B thick films for magnetic micromachines」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル