Safe membrane-releasing process for thermoelectric hydrogen gas sensor

L. F. Houlet, W. Shin, M. Nishibori, N. Izu, T. Itoh, I. Matsubara

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We present here a safe membrane-releasing process in KOH for the fabrication of a high performance freestanding device and the mass production of a single membrane device for the hydrogen gas sensing application. The fabricated devices are thermoelectric hydrogen gas sensors based on the thermoelectric detection of the catalytic hydrogen combustion. The free-standing device has a voltage response 2.7 times higher than the single membrane device. The proposed membrane-releasing process, which combines black wax and a KOH protective polymer coat, shows fabrication yields of 31%, 50% for the free-standing device and 47% for the single-membrane device produced in mass.

本文言語英語
ホスト出版物のタイトルThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
ページ1032-1035
ページ数4
DOI
出版ステータス出版済み - 2007
外部発表はい
イベント6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, 米国
継続期間: 10 28 200710 31 2007

出版物シリーズ

名前Proceedings of IEEE Sensors

その他

その他6th IEEE Conference on SENSORS, IEEE SENSORS 2007
国/地域米国
CityAtlanta, GA
Period10/28/0710/31/07

All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

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