Scanning measurement of step height and freeform surface by using optically trapped microsphere

M. Michihata, Y. Takaya, T. Washitani, T. Hayashi

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

抄録

Currently we study the scanning type probe for surface profile by developing the optically trapped microsphere. In this paper, firstly performance of the scanning mode was examined by comparing with the tactile mode. Secondly, the method to measure a step height with scanning mode was proposed. At first, profile measurement of an aspheric lens by both tactile and scanning mode was conducted in order to assess the scanning mode with the standing wave scale. The measured results shows that the measured shape by scanning mode was coincident with the result by the tactile mode well. Besides, it was proposed the method to evaluate a step height with the optically trapped scanning probe with the SWS through measurement of the micro-groove depth. The results of a step height measurement were agreed with one from FE-SEM.

本文言語英語
ホスト出版物のタイトルProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
編集者Paul Shore, H. Spaan, Theresa Burke
出版社euspen
ページ64-67
ページ数4
ISBN(電子版)9780956679000
出版ステータス出版済み - 2012
外部発表はい
イベント12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, スウェーデン
継続期間: 6月 4 20126月 7 2012

出版物シリーズ

名前Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
1

その他

その他12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
国/地域スウェーデン
CityStockholm
Period6/4/126/7/12

!!!All Science Journal Classification (ASJC) codes

  • 産業および生産工学
  • 機械工学
  • 器械工学
  • 環境工学
  • 材料科学(全般)

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