Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

研究成果: Contribution to journalArticle

9 引用 (Scopus)

抜粋

The new scanning type microprobe, based on a standing wave pattern as the interferometric scale and an optically trapped microprobe as the sensing probe to read the scale, is proposed. To confirm the measurement principle the fundamental investigation was conducted experimentally and the properties such as the accuracy, the resolution and the measurable range are evaluated. The feasibility as amicro-displacement sensor is indicated by measurement results of a silicon wafer surface and a silicon sphere. In order to investigate the ability of three-dimensional measurement the scanning measurement of a micro spherical lens with a diameter of 2 mm is carried out.

元の言語英語
ページ(範囲)395-402
ページ数8
ジャーナルInternational Journal of Automation Technology
5
発行部数3
DOI
出版物ステータス出版済み - 1 1 2011
外部発表Yes

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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