Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

研究成果: Contribution to journalArticle査読

10 被引用数 (Scopus)

抄録

The new scanning type microprobe, based on a standing wave pattern as the interferometric scale and an optically trapped microprobe as the sensing probe to read the scale, is proposed. To confirm the measurement principle the fundamental investigation was conducted experimentally and the properties such as the accuracy, the resolution and the measurable range are evaluated. The feasibility as amicro-displacement sensor is indicated by measurement results of a silicon wafer surface and a silicon sphere. In order to investigate the ability of three-dimensional measurement the scanning measurement of a micro spherical lens with a diameter of 2 mm is carried out.

本文言語英語
ページ(範囲)395-402
ページ数8
ジャーナルInternational Journal of Automation Technology
5
3
DOI
出版ステータス出版済み - 1 1 2011
外部発表はい

All Science Journal Classification (ASJC) codes

  • 機械工学
  • 産業および生産工学

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