Self-compensated standing wave probe for characterization of radio-frequency plasmas

Ta Lun Sung, Shosaku Matsumura, Kungen Tsutsui, Shinriki Teii

研究成果: ジャーナルへの寄稿記事

抄録

A simple self-compensated Langmuir probe using the character of a standing wave is developed for characterization of radio-frequency (RF) discharge plasmas. This probe is based on a concept that the interference of RF field is eliminated at the node of a standing wave which exists ideally at one-fourth of the RF wavelength (λ/4) away from the probe tip in the plasma. The fluctuation of plasma space potential is suppressed as confirmed by comparison with a non-compensated probe and a self-compensated probe using an inductor-capacitor (LC) resonant circuit. The plasma parameters obtained with the standing wave probe are in agreement with those with the LC resonant probe within discrepancy of 15% indicating high reliability of the results.

元の言語英語
記事番号063507
ジャーナルReview of Scientific Instruments
85
発行部数6
DOI
出版物ステータス出版済み - 1 1 2014

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standing waves
radio frequencies
Plasmas
probes
Resonant circuits
Langmuir probes
radio frequency discharge
space plasmas
inductors
electrostatic probes
capacitors
Capacitors
interference
Wavelength
wavelengths

All Science Journal Classification (ASJC) codes

  • Instrumentation

これを引用

Self-compensated standing wave probe for characterization of radio-frequency plasmas. / Sung, Ta Lun; Matsumura, Shosaku; Tsutsui, Kungen; Teii, Shinriki.

:: Review of Scientific Instruments, 巻 85, 番号 6, 063507, 01.01.2014.

研究成果: ジャーナルへの寄稿記事

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abstract = "A simple self-compensated Langmuir probe using the character of a standing wave is developed for characterization of radio-frequency (RF) discharge plasmas. This probe is based on a concept that the interference of RF field is eliminated at the node of a standing wave which exists ideally at one-fourth of the RF wavelength (λ/4) away from the probe tip in the plasma. The fluctuation of plasma space potential is suppressed as confirmed by comparison with a non-compensated probe and a self-compensated probe using an inductor-capacitor (LC) resonant circuit. The plasma parameters obtained with the standing wave probe are in agreement with those with the LC resonant probe within discrepancy of 15{\%} indicating high reliability of the results.",
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