Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate

W. Nomura; T. Yatsui; Y. Yanase; K. Suzuki; M. Fujita; A. Kamata; M. Naruse; M. Ohtsu

Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate

W. Nomura, T. Yatsui, Y. Yanase, K. Suzuki, M. Fujita, A. Kamata, M. Naruse, M. Ohtsu

研究成果: 書籍/レポートタイプへの寄稿 › 会議への寄与

抄録

The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.

本文言語	英語
ホスト出版物のタイトル	Conference on Lasers and Electro-Optics, CLEO 2010
出版ステータス	出版済み - 12月 1 2010
イベント	Conference on Lasers and Electro-Optics, CLEO 2010 - San Jose, CA, 米国継続期間: 5月 16 2010 → 5月 21 2010

出版物シリーズ

名前	Optics InfoBase Conference Papers
ISSN（電子版）	2162-2701

その他

その他	Conference on Lasers and Electro-Optics, CLEO 2010
国/地域	米国
City	San Jose, CA
Period	5/16/10 → 5/21/10

!!!All Science Journal Classification (ASJC) codes

器械工学
原子分子物理学および光学

他のファイルとリンク

フィンガープリント

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引用スタイル

Nomura, W, Yatsui, T, Yanase, Y, Suzuki, K, Fujita, M, Kamata, A, Naruse, M & Ohtsu, M 2010, Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al₂O₃ ceramic substrate. in Conference on Lasers and Electro-Optics, CLEO 2010. Optics InfoBase Conference Papers, Conference on Lasers and Electro-Optics, CLEO 2010, San Jose, CA, 米国, 5/16/10.

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title = "Self-organized nonadiabatic optical near-field assisted sputtering for repairing surface scratches on Al2O3 ceramic substrate",

abstract = "The scratches on the surface of Al2O3 ceramics were repaired by optical near-field assisted sputtering with laser irradiation of 473-nm wavelength in a self-organized manner. Their average depth decreased from 3.2 nm to 0.79 nm.",

author = "W. Nomura and T. Yatsui and Y. Yanase and K. Suzuki and M. Fujita and A. Kamata and M. Naruse and M. Ohtsu",

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AU - Nomura, W.

AU - Yatsui, T.

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AU - Suzuki, K.

AU - Fujita, M.

AU - Kamata, A.

AU - Naruse, M.

AU - Ohtsu, M.

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