Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method

Weigang Ma, Xing Zhang, Keisuke Kubo, Masamichi Kohno, Yasuyuki Takata, Tatsuya Ikuta, Koji Takahashi

研究成果: 会議への寄与タイプ論文

抄録

With the continued size reduction and operation frequency increase in micro/nanoelectromechanical systems, heat accumulation has become more critical. It is crucial to carry out an in-depth investigation on the thermal transport properties of thin metal films, i.e., electron-phonon relaxation, thermal diffusivity and interfacial thermal resistance. In this paper, series study of the thermal transport properties of thin metal films have been performed by applying transient thermoreflectance method, including femtosecond and picosecond laser thermoreflectance systems. The electron-phonon coupling factor of thin gold films with different thickness have been measured by applying femtosecond laser thermoreflectance system. The results show that the electronphonon relaxation is nearly the same as that of bulk gold and independent of film thickness. The cross-plane thermal diffusivity of 95.3 and 200-nm-thick molybdenum film has been studied by applying the picosecond laser thermoreflectance system. The measurement results show that the cross-plane thermal diffusivity of molybdenum thin film decrease significantly compared to the corresponding bulk value and tends to increase as films become thicker.

元の言語英語
出版物ステータス出版済み - 1 1 2014
イベント15th International Heat Transfer Conference, IHTC 2014 - Kyoto, 日本
継続期間: 8 10 20148 15 2014

その他

その他15th International Heat Transfer Conference, IHTC 2014
日本
Kyoto
期間8/10/148/15/14

Fingerprint

thermal diffusivity
Transport properties
Thermal diffusivity
transport properties
metal films
molybdenum
gold
Molybdenum
lasers
Gold
thermal resistance
NEMS
Electron transport properties
thick films
Electrons
Lasers
electrons
film thickness
Ultrashort pulses
Metals

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Condensed Matter Physics

これを引用

Ma, W., Zhang, X., Kubo, K., Kohno, M., Takata, Y., Ikuta, T., & Takahashi, K. (2014). Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method. 論文発表場所 15th International Heat Transfer Conference, IHTC 2014, Kyoto, 日本.

Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method. / Ma, Weigang; Zhang, Xing; Kubo, Keisuke; Kohno, Masamichi; Takata, Yasuyuki; Ikuta, Tatsuya; Takahashi, Koji.

2014. 論文発表場所 15th International Heat Transfer Conference, IHTC 2014, Kyoto, 日本.

研究成果: 会議への寄与タイプ論文

Ma, W, Zhang, X, Kubo, K, Kohno, M, Takata, Y, Ikuta, T & Takahashi, K 2014, 'Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method' 論文発表場所 15th International Heat Transfer Conference, IHTC 2014, Kyoto, 日本, 8/10/14 - 8/15/14, .
Ma W, Zhang X, Kubo K, Kohno M, Takata Y, Ikuta T その他. Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method. 2014. 論文発表場所 15th International Heat Transfer Conference, IHTC 2014, Kyoto, 日本.
Ma, Weigang ; Zhang, Xing ; Kubo, Keisuke ; Kohno, Masamichi ; Takata, Yasuyuki ; Ikuta, Tatsuya ; Takahashi, Koji. / Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method. 論文発表場所 15th International Heat Transfer Conference, IHTC 2014, Kyoto, 日本.
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AU - Takata, Yasuyuki

AU - Ikuta, Tatsuya

AU - Takahashi, Koji

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