Series study on the thermal transport properties of nanofilm by applying transient thermoreflectance method

Weigang Ma, Xing Zhang, Keisuke Kubo, Masamichi Kohno, Yasuyuki Takata, Tatsuya Ikuta, Koji Takahashi

研究成果: Contribution to conferencePaper査読

抄録

With the continued size reduction and operation frequency increase in micro/nanoelectromechanical systems, heat accumulation has become more critical. It is crucial to carry out an in-depth investigation on the thermal transport properties of thin metal films, i.e., electron-phonon relaxation, thermal diffusivity and interfacial thermal resistance. In this paper, series study of the thermal transport properties of thin metal films have been performed by applying transient thermoreflectance method, including femtosecond and picosecond laser thermoreflectance systems. The electron-phonon coupling factor of thin gold films with different thickness have been measured by applying femtosecond laser thermoreflectance system. The results show that the electronphonon relaxation is nearly the same as that of bulk gold and independent of film thickness. The cross-plane thermal diffusivity of 95.3 and 200-nm-thick molybdenum film has been studied by applying the picosecond laser thermoreflectance system. The measurement results show that the cross-plane thermal diffusivity of molybdenum thin film decrease significantly compared to the corresponding bulk value and tends to increase as films become thicker.

本文言語英語
DOI
出版ステータス出版済み - 2014
イベント15th International Heat Transfer Conference, IHTC 2014 - Kyoto, 日本
継続期間: 8 10 20148 15 2014

その他

その他15th International Heat Transfer Conference, IHTC 2014
Country日本
CityKyoto
Period8/10/148/15/14

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Condensed Matter Physics

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