Shearing force measurement device with a built-in integrated micro displacement sensor

Takuma Iwasaki, Toshihiro Takeshita, Yuji Arinaga, Satoshi Takeuchi, Masutaka Furue, Eiji Higurashi, Renshi Sawada, Koji Uemura, Hideyuki Ando

研究成果: ジャーナルへの寄稿学術誌査読

20 被引用数 (Scopus)


The measurement of shearing force is increasingly important in the detection of slipping and the measurement of friction. In this paper, we propose a promising shearing force measurement device that is 16.3 mm × 2.9 mm × 6.0 mm, using an integrated micro displacement sensor and a trapezoidal external metallic frame. The optoelectronic subsection of the sensor is 6.5 mm × 6.5 mm, and is 1.6 mm thick. This subsection is used to measure the tilt angle of a mirror on the ceiling of the frame caused by the shearing force applied to the upper surface of the frame. We have been able to successfully obtain a linear output change for a single axis shearing force, and determined that the measurement sensitivity differs largely due to the material and shape of the frame. Therefore, if these factors are known this device can be embedded in various applications.

ジャーナルSensors and Actuators, A: Physical
出版ステータス出版済み - 1月 1 2015

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 器械工学
  • 凝縮系物理学
  • 表面、皮膜および薄膜
  • 金属および合金
  • 電子工学および電気工学


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