We present here performance of Li ion batteries with SiC nanoparticle-film anode, which is fabricated by a double multi-hollow discharge plasma chemical vapor deposition (CVD) method. The first cycle of charge/discharge property of the Li ion battery with the SiC nanoparticle-film anode shows a high capacity of over 4,000 mAh/g, which is 12 times higher than the Li ion battery with the conventional graphite anode. The discharge capacity shows high stability for first 10th cycle, and is 3750 mAh/g for the 10th cycle.
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