Silicon twisted cone structure produced by optical vortex pulse with structure evaluation by radiation hydrodynamic simulation

Daisuke Nakamura, Ryohei Tasaki, Miki Kawamoto, Hiroki Oshima, Mitsuhiro Higashihata, Hiroshi Ikenoue, Toshitaka Wakayama, Atsushi Sunahara, Takeshi Higashiguchi

研究成果: ジャーナルへの寄稿学術誌査読

2 被引用数 (Scopus)

抄録

We demonstrate a radiation hydrodynamic simulation of optical vortex pulse-ablated microcone structures on silicon (Si) substrates. Doughnut-shaped craters were formed by single pulse irradiation on the Si substrate, and a twisted cone structure with a height of 3.5 µm was created at the center of the irradiation spot by the circularly polarized optical vortex pulse. A two-dimensional (2-D) radiation hydrodynamic simulation reproduced the cone structure well with a height of 3 µm. The central part of the incident laser power was lowered from the initial profile due to plasma shielding over the laser pulse duration for an inverted double-well laser profile. The acute tip shape of the silicon surface can survive over the laser irradiation period.

本文言語英語
論文番号20512
ジャーナルScientific reports
10
1
DOI
出版ステータス出版済み - 12月 2020

!!!All Science Journal Classification (ASJC) codes

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