Similarities in spatial distributions of absolute GeH2 density, radical production rate and particle amount in GeH4 RF discharges
Hiroharu Kawasaki, Junichirou Kida, Kazutaka Sakamoto, Tsuyoshi Fukuzawa, Masaharu Shiratani, Yukio Watanabe
研究成果: ジャーナルへの寄稿 › 学術誌 › 査読
1
被引用数
(Scopus)