Simple and simultaneous measurement of five-degrees-of-freedom error motions for a micro high-speed spindle

H. Murakami, A. Katsuki, Takao Sajima, N. Nakayama

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

We present a simple and low-cost optical measurement system to measure simultaneously five-degrees-of-freedom error motions of high-speed microspindles. In this study, measurement error due to displacement of an irradiation laser spot on a 3 mm diameter ball lens is analyzed. The results show that the maximum error in the Z direction due to the 7μm displacement of the laser spot in the X direction is about 0.15 nm, i.e., the change of the laser beam irradiation point of the ball lens caused by the radial displacement has little effect on the measurement accuracy.

本文言語英語
ホスト出版物のタイトルProceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
編集者H. Spaan, Theresa Burke, Paul Shore
出版社euspen
ページ46-49
ページ数4
ISBN(電子版)9780956679000
出版ステータス出版済み - 1 1 2012
イベント12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012 - Stockholm, スウェーデン
継続期間: 6 4 20126 7 2012

出版物シリーズ

名前Proceedings of the 12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
2

その他

その他12th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2012
Countryスウェーデン
CityStockholm
Period6/4/126/7/12

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering
  • Materials Science(all)

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